Труды Института механики им. Р.Р. Мавлютова

ISSN 2542–0380

Электронный научный журнал | Electronic Scientific Journal

Proceedings of the Mavlyutov Institute of Mechanics

Migranov A.B. Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation Proceedings of the Institute of Mechanics of Ufa Branch of RAS. 4 (2006). 288–305.

2006. Vol. 4. Issue 1, Pp. 288–305
URL: http://proc.uimech.org/uim2006.1.025,en
DOI: 10.21662/uim2006.1.025

Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation

Migranov A.B.

Institute of Mechanics, Ufa

Abstract

The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.

Keywords

MEMS,
microbot parts,
special software,
specialized virtual system